Device for optical coupling of a solid-state laser with an optical wave guide and a process for their production

ABSTRACT

In a device for the optical coupling of a solid-state laser to an optical fiber, an anamorphic lens system being arranged between the output face of the solid-state laser and the input face of the optical fiber and converting differing apertures in the main sections of the solid-state laser into essentially identical apertures at the input face of the optical fiber, the lens system is composed of one anamorphic lens applied on the output face and a further lens applied on the input face. The invention also includes a method for producing the device.

[0001] The invention relates to a device for the optical coupling of a solid-state laser to an optical fiber, an anamorphic lens system being arranged between the output face of the solid-state laser and the input face of the optical fiber and converting differing apertures in the main sections of the solid-state laser into essentially identical apertures at the input face of the optical fiber, and to a method for its manufacture.

[0002] For efficient coupling of laser light into optical fibers, particularly into single-mode optical fibers, it is necessary to achieve minimum-loss coupling of the optical fiber to the laser. This can be effected by lenses applied to the fiber end. In the case of solid-state lasers, it is also desirable to minimize to the greatest extent possible the loss of light caused by coupling the laser to the fiber. For this purpose, it has become known, for instance, from R. Zengerle, H. J. Brückner, H. W. P. Koops, H.-J. Olzhausen, G. Zesch, A. Kohl and A. Menschig in “Fabrication of Optical Beamwidth Transformers for Guided Waves on InP Using Wedge-Shaped Tapers”, J. Vac. Sci. Technol. B9(6), (1991) 3459, to use lithography to define and integrate a made-to-order coupling taper on the laser directly in the laser material. Such tapers, however, are only able to adapt the wave field to the phase in one section. Owing to the epitactic growth and the plane lithography used for the structuring, no adaptation is possible in the other section lying normal to the waveguide.

[0003] In addition, a device as set forth by the species defined in the Main Claim is known from U. Griebner, R. Grunwald, H. Schönnagel, OSA Proceedings on Advanced Solid-State Lasers, 1995, Vol. 24, 253, which, however, requires considerable expenditure for adjustments. Devices having in each case several lenses to be adjusted and fixed in position are also known from U.S. Pat. No. 5,140,608, GB 2 220 501 A, DE 39 19 484 A, EP 0 484 276 A, NL 8600844 A and EP 0 706 070 A.

[0004] The object of the present invention is to propose a device for coupling a solid-state laser to an optical fiber, which permits substantially no-loss coupling and an adaptation of the wave fields in the direction of both main sections, and which can be manufactured with the necessary accuracy.

[0005] This objective is achieved according to the invention, in that the lens system is composed of one anamorphic lens mounted on the output face and a further lens mounted on the input face.

[0006] The device of the present invention has the advantage that in each case, the lenses can be applied on the output face and input face, respectively, with very high accuracy. An adjustment is then only necessary between the laser axis and the axis of the optical fiber. Both the anamorphic lens and the further lens can be advantageously manufactured using well-known processes.

[0007] It may be that an anamorphic lens on the input face is not ruled out in the device of the present invention, however, the further lens is preferably spherical. Moreover, the invention permits two designs, namely that the anamorphic lens mounted on the output face of the laser is an aspherical lens, which can be a Fresnel lens, or is formed of two crossed, cylindrical partial lenses, at least one of the component lenses being designed as a Fresnel lens.

[0008] The advantageous specific embodiment of the device according to the invention can further be designed in such a way that a spacer layer, corresponding to the magnification necessary in the direction of the larger aperture, is provided between the anamorphic lens and the output face.

[0009] Besides a real imaging of the output pupil of the laser, the device of the present invention makes it possible for the output pupils of the laser to form a virtual circular source image. Because of this, it is possible to select a small distance between the lenses or between the output and input faces, accompanied by relatively great focal lengths of the lenses. The great focal lengths of the lenses, in turn, are more favorable for production using microtechnique methods.

[0010] Various well-known methods are suitable in principle, such as the definition of the cylinder lenses on the input face of the optical fiber with the aid of high-resolution electron-beam lithography and subsequent fabrication by reactive dry etching. Such a method is described, for instance, in “High Resolution Electron Beam Lithography for Fabricating Visible Semiconductor Lasers with Curved Mirrors and Integrated Holograms” by P. Unger, V. Boegli, P. Buchmann and R. Germann, Microelectronic Eng. 23, (1994) 461 and in “Fabrication of curved mirrors for visible semiconductor lasers using electron-beam lithography and chemical assisted ion-beam etching” by P. Unger, V. Boegli, P. Buchmann and R. Germann, J. Vac. Sci. Technol., B. 11(6) (1993) 2514-2518. Machining from resist lenses applied on the input or output face is also possible.

[0011] Particularly advantageous methods for producing the device of the present invention are specified in further subclaims. These methods represent substantial improvements, especially if they are supported by computer programming. It is also possible to produce the individual elements using different methods.

[0012] The dry-resist technique, described, for example, in the German Patent 195 31 859.5 Al, makes available a method in which, using vapor deposition in high vacuum, the laser or the fiber end is covered with a defined layer thickness of a polymer which is sensitive to electrons. This polymer is cross-linked by the electron beam during the exposure to form a polymer which is rich in silicon oxide and whose refractive index is well-matched to that of the fiber material (n=1.48), see H. W. P. Koops, S. Babin, M. Weber, G. Dahm, A. Holopkin, M. Lyakhov, “Evaluation of Dry Resist Viny-T8 and Its Application to Optical Microlenses”, Microelectronic Engineering 30 (1996), 539. A mirror composed of silicon oxide is applied by vapor deposition to the laser end, the refractive index of the lens material likewise being well-matched to that of the mirror. Thus, the insertion loss of these lenses manufactured from dry resist can theoretically be disregarded. constructing the lenses which is superior, for example, to laser ablation. These procedures can be easily automated for productive use.

[0013] Exemplary embodiments of the invention are shown schematically in the Drawing with the aid of several Figures, and are explained more precisely in the following description.

[0014]FIG. 1 shows an exemplary embodiment in the y-z section;

[0015]FIG. 2 shows the exemplary embodiment in the x-z section in an appropriately modified scale; and

[0016]FIG. 3 shows another exemplary embodiment in the x-z section.

[0017] Located in a plane 1 is an anamorphic plano-convex lens 2 with focal points F_(y) and −F_(y). The light output face of a solid-state laser, which is otherwise now shown, lies in plane 3. The source image is located at 4, a virtual magnified imagery of the source image resulting at 5.

[0018] Since in the y-z section (FIG. 1), the light emerging from output face 3 is virtually unfocussed, a large aperture is necessary to collect as large a portion of the total luminous flux as possible which, in the exemplary embodiment shown, is achieved by arranging a lens which is not too large as close as possible to output face 3—namely, as close as possible for a virtual imagery.

[0019] The optical fiber, only partially indicated, is composed of an optically active core 6 and a cladding 7. Applied on light input face 8 is a spherical lens 9 which creates in core 6 a real image of virtual imagery 5.

[0020] For the sake of clarity, the schematic representation is not true to scale. The following dimensions are given as examples:

[0021] The focal length of the lens, and simultaneously the approximate thickness of a spacer layer between lens 2 and plane 3, is f=1.43 μm, with a refractive index of anamorphic lens 2 of n=2.75 and a radius of R=3.9 μm. The width of the output face is d₀=0.3 μm, while the diameter of core 6 is d₁=10 μm. The apertures are a₀=45° and a₁=10°, the magnification is V=14=B/g=20/f.

[0022]FIG. 2 shows the same exemplary embodiment in the x-z section. Mounted here on the output face of the laser is a lens having a long focal length in the x-z section or a Fresnel lens (in the case of the exemplary embodiment according to FIG. 3), by which the light of small aperture a₀ is focused onto lens 9. 

1. A device for the optical coupling of a solid-state laser to an optical fiber, an anamorphic lens system being arranged between the output face of the solid-state laser and the input face of the optical fiber and converting differing apertures in the main sections of the solid-state laser into essentially identical apertures at the input face of the optical fiber, characterized in that the lens system is composed of one anamorphic lens (2) mounted on the output face (3) and a further lens (9) mounted on the input face (8).
 2. The device as recited in claim 1, characterized in that the further lens (9) is spherical.
 3. The device as recited in one of claims 1 or 2, characterized in that the anamorphic lens is an aspherical lens (2).
 4. The device as recited in claim 3, characterized in that the anamorphic lens is designed as a Fresnel lens (21).
 5. The device as recited in one of claims 1 or 2, characterized in that the anamorphic lens is formed from two crossed, cylindrical partial lenses, and that at least one of the component lenses is designed as a Fresnel lens.
 6. The device as recited in one of claims 1 through 5, characterized in that provision is made between the anamorphic lens (2) and the output face (3) for a spacer layer corresponding to the magnification necessary in the direction of the larger aperture.
 7. A method for producing the device as recited in one of the preceding claims, characterized in that at least the lenses are produced with the aid of a dry-resist technique.
 8. The method as recited in claim 7, characterized in that, in addition, spacer layers and antireflection layers are produced with the aid of the dry-resist technique.
 9. A method for producing the device as recited in one of the preceding claims, characterized in that at least the lenses are produced with the aid of additive lithography, in particular, electron-beam lithography.
 10. The method as recited in claim 9, characterized in that, in addition, spacer layers and antireflection layers are produced with the aid of the additive lithography. 